Ebook Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger
It is very simple to read guide Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger in soft file in your gadget or computer system. Again, why must be so hard to obtain the book Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger if you can decide on the less complicated one? This web site will certainly ease you to choose and decide on the best cumulative publications from the most ideal seller to the released book just recently. It will certainly constantly update the compilations time to time. So, hook up to internet and see this website consistently to obtain the brand-new publication each day. Now, this Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger is yours.
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger
Ebook Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger
Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger. In undergoing this life, lots of people constantly aim to do and obtain the very best. New expertise, encounter, lesson, and everything that can improve the life will certainly be done. However, many individuals in some cases feel puzzled to obtain those points. Really feeling the restricted of experience and also sources to be far better is one of the lacks to own. However, there is a very easy thing that could be done. This is just what your instructor constantly manoeuvres you to do this one. Yeah, reading is the solution. Checking out a publication as this Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger and other references can enrich your life high quality. Just how can it be?
If you get the published book Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger in on-line book store, you might likewise locate the exact same issue. So, you must relocate store to establishment Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger and also search for the readily available there. But, it will certainly not occur below. Guide Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger that we will certainly supply right here is the soft data concept. This is exactly what make you could effortlessly locate as well as get this Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger by reading this site. We provide you Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger the best item, constantly and also always.
Never doubt with our deal, due to the fact that we will constantly offer what you require. As such as this updated book Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger, you could not locate in the various other location. Yet below, it's extremely simple. Simply click and download, you can possess the Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger When simplicity will relieve your life, why should take the complex one? You could acquire the soft data of guide Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger right here and be participant people. Besides this book Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger, you can additionally discover hundreds lists of the books from numerous resources, compilations, publishers, as well as authors in worldwide.
By clicking the link that our company offer, you can take guide Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger perfectly. Attach to internet, download, and also conserve to your device. What else to ask? Checking out can be so simple when you have the soft documents of this Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger in your device. You could also copy the documents Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger to your workplace computer system or in your home or even in your laptop computer. Just discuss this excellent information to others. Recommend them to visit this page and also get their hunted for books Introduction To Microelectronic Fabrication: Volume 5 Of Modular Series On Solid State Devices (2nd Edition), By Richard C. Jaeger.
This introductory book assumes minimal knowledge of the existence of integrated circuits and of the terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors. It presents to readers the basic information necessary for more advanced processing and design books. Focuses mainly on the basic processes used in fabrication, including lithography, oxidation, diffusion, ion implementation, and thin film deposition. Covers interconnection technology, packaging, and yield. Appropriate for readers interested in the area of fabrication of solid state devices and integrated circuits.
- Sales Rank: #604995 in Books
- Published on: 2001-10-27
- Original language: English
- Number of items: 1
- Dimensions: 9.30" h x .90" w x 7.00" l, 1.04 pounds
- Binding: Paperback
- 316 pages
From the Back Cover
Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
Excerpt. � Reprinted by permission. All rights reserved.
The spectacular advances in the development and application of integrated circuit (IC) technology have led to the emergence of microelectronics process engineering as an independent discipline. Additionally, the pervasive use of integrated circuits requires a broad range of engineers in the electronics and allied industries to have a basic understanding of the behavior and limitations of ICs. One of the goals of this book is to address the educational needs of individuals with a wide range of backgrounds.
This text presents an introduction to the basic processes common to most IC technologies and provides a base for understanding more advanced processing and design courses. In order to contain the scope of the material, we deal only with material related to silicon processing and packaging. The details of many problems specifically related to VLSI/ULSI fabrication are left to texts on advanced processing, a4ough problem areas are mentioned at various points in this text, and goals of the international Technology Roadmap for Semiconductors are discussed as appropriate.
Chapter 1 provides an overview of IC processes, and Chapters 2-6 then focus on the basic steps used in fabrication, including lithography, oxidation, diffusion, ion implantation and thin film deposition, and etching. Interconnection technology, packaging, and yield are covered in Chapters 7 and 8. It is important to understand interactions between process design, device design, and device layout. For this reason, Chapter 9 and 10 on MOS and bipolar process integration have been included. Chapter 11 provides a brief introduction to the exciting area of Microelectromechanical Systems (MEMS).
Major changes in the second edition of this text include new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient-enhanced diffusion, copper Damescene processes, and process simulation. The chapters on MOS and bipolar process integration have been substantially modified, and the chapter on MEMS is entirely new. The problem sets have been expanded, and additional information on measurement techniques has been included.
The text evolved from notes originally developed for a course introducing seniors and beginning graduate students to the fabrication of solid-state devices and integrated circuits. A basic knowledge of the material properties of silicon is needed, and we use Volume I of this Series as a companion text. An introductory knowledge of electronic components such as resistors, diodes, and MOS and bipolar transistors is also useful.
The material in the book is designed to be covered in one semester. In our case, the microelectronics fabrication course is accompanied by a corequisite laboratory. The students design a simple device or circuit based upon their individual capability, and the designs are combined on a multiproject polysilicon gate NMOS chip. Design, fabrication, and testing are completed within the semester. Students from a variety of disciplines, including electrical, mechanical, chemical, and materials engineering; computer science; and physics, are routinely enrolled in the fabrication classes.
Before closing, I must recognize a number of other books that have influenced the preparation of this text. These include The Theory and Practice of Microelectronics and VLSI Fabrication Principles by S. K. Ghandi, Basic Integrated Circuit Engineering by D. J. Hamilton and W.G. Howard, Integrated Circuit Engineering by A.H. Glaser and G.E. Subak-Sharpe, Microelectronic Processing and Device Design by R.A. Colclaser, Semiconductor Devices—Physics and Technology by S.M. Sze, Semiconductor Integrated Circuit Processing Technology by W.R. Runyon and K.E. Bean, and The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell.
Thanks also go to the many colleagues who have provided suggestions and encouragement for the new edition and especially to our laboratory manager Charles Ellis who has been instrumental in molding the laboratory sections of our course. RICHARD C. JAEGER
Auburn, Alabama
Excerpt. � Reprinted by permission. All rights reserved.
The spectacular advances in the development and application of integrated circuit (IC) technology have led to the emergence of microelectronics process engineering as an independent discipline. Additionally, the pervasive use of integrated circuits requires a broad range of engineers in the electronics and allied industries to have a basic understanding of the behavior and limitations of ICs. One of the goals of this book is to address the educational needs of individuals with a wide range of backgrounds.
This text presents an introduction to the basic processes common to most IC technologies and provides a base for understanding more advanced processing and design courses. In order to contain the scope of the material, we deal only with material related to silicon processing and packaging. The details of many problems specifically related to VLSI/ULSI fabrication are left to texts on advanced processing, a4ough problem areas are mentioned at various points in this text, and goals of the international Technology Roadmap for Semiconductors are discussed as appropriate.
Chapter 1 provides an overview of IC processes, and Chapters 2-6 then focus on the basic steps used in fabrication, including lithography, oxidation, diffusion, ion implantation and thin film deposition, and etching. Interconnection technology, packaging, and yield are covered in Chapters 7 and 8. It is important to understand interactions between process design, device design, and device layout. For this reason, Chapter 9 and 10 on MOS and bipolar process integration have been included. Chapter 11 provides a brief introduction to the exciting area of Microelectromechanical Systems (MEMS).
Major changes in the second edition of this text include new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient-enhanced diffusion, copper Damescene processes, and process simulation. The chapters on MOS and bipolar process integration have been substantially modified, and the chapter on MEMS is entirely new. The problem sets have been expanded, and additional information on measurement techniques has been included.
The text evolved from notes originally developed for a course introducing seniors and beginning graduate students to the fabrication of solid-state devices and integrated circuits. A basic knowledge of the material properties of silicon is needed, and we use Volume I of this Series as a companion text. An introductory knowledge of electronic components such as resistors, diodes, and MOS and bipolar transistors is also useful.
The material in the book is designed to be covered in one semester. In our case, the microelectronics fabrication course is accompanied by a corequisite laboratory. The students design a simple device or circuit based upon their individual capability, and the designs are combined on a multiproject polysilicon gate NMOS chip. Design, fabrication, and testing are completed within the semester. Students from a variety of disciplines, including electrical, mechanical, chemical, and materials engineering; computer science; and physics, are routinely enrolled in the fabrication classes.
Before closing, I must recognize a number of other books that have influenced the preparation of this text. These include The Theory and Practice of Microelectronics and VLSI Fabrication Principles by S. K. Ghandi, Basic Integrated Circuit Engineering by D. J. Hamilton and W.G. Howard, Integrated Circuit Engineering by A.H. Glaser and G.E. Subak-Sharpe, Microelectronic Processing and Device Design by R.A. Colclaser, Semiconductor Devices—Physics and Technology by S.M. Sze, Semiconductor Integrated Circuit Processing Technology by W.R. Runyon and K.E. Bean, and The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell.
Thanks also go to the many colleagues who have provided suggestions and encouragement for the new edition and especially to our laboratory manager Charles Ellis who has been instrumental in molding the laboratory sections of our course.
RICHARD C. JAEGER
Auburn, Alabama
Most helpful customer reviews
0 of 0 people found the following review helpful.
okay
By deskswirl
Its okay. Kinda glosses over the important details but supplemented with good motes it makes for an easy read. Much shorter than Campbell.
0 of 0 people found the following review helpful.
Good Examples
By Tim
Good book, good examples
3 of 3 people found the following review helpful.
Almost adequate
By Bubbium Oxidium
Book is seriously lacking required information to solve the examples let alone the problems. For example chapter six's first example is 6.2. What happened to 6.1? The equation for mean free path (6.6), what is p? Is it the same as P in equation (6.5)? Who knows since there is no example or explanation. Attempting to get the same reults in the text become time consuming and frustrating because all the required information is absent. The book is lacking detail. Avoid it at all possible costs. Hey anyone out there thinking they can write a better book than this go for it. This one needs to be put off the marketplace.
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger PDF
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger EPub
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger Doc
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger iBooks
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger rtf
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger Mobipocket
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition), by Richard C. Jaeger Kindle
Tidak ada komentar:
Posting Komentar